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精密五金蚀刻技术分析

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精密五金蚀刻技术分析

发布日期:2015-05-13 00:00 来源:http://juransc.com 点击:

  YI、YUANLI

  其基本原理是运用化学感光资料的光敏特性, 在基体金属基片双面均匀涂敷感光资料选用光刻办法, 将胶膜板上栅网产显形状精确地复制到金属基片双面的感光层掩膜上通过显影去掉未感光有些的掩膜, 将暴露的金属有些在后续的加工中与腐蚀液直接喷压触摸而被蚀除, 最终获取所需的几何形状及高精度尺度的商品技能精密五金蚀刻技能。

  ER、JUXIAN

  精密五金蚀刻技能是运用特定的溶液与薄膜间所进行的化学反响来去掉薄膜未被光阻覆盖的有些,而抵达精密五金蚀刻的目的,这种精密五金蚀刻办法也即是所谓的湿式精密五金蚀刻。由于湿式精密五金蚀刻是运用化学反响来进行薄膜的去掉,而化学反响自身不具方向性,因而湿式精密五金蚀刻进程为等向性,一般来说此办法不足以界说3微米以下的线宽,但对于3微米以上的线宽界说湿式精密五金蚀刻仍然为一可挑选选用的技能。

上海11选5走势图  3、SHISHIJINGMIWUJINSHIKEDEZHANGCHU

上海11选5走势图  DICHENGBEN、GAOKEKAOXING、GAOCHANNENGJIYOUSHENGDEJINGMIWUJINSHIKETIAOXUANBI。DANXIANGDUIYUGANSHIJINGMIWUJINSHIKE,CHULEWUFAJIESHUOJIAOXIDEXIANKUANWAI,SHISHIJINGMIWUJINSHIKERENGYOUYIXIADEQUEDIAN:1) XUHUAFEIJIAOGAOCHENGBENDEFANXIANGRONGYEJIQULIZISHUI;2) HUAXUEYAOPINCHULISHIRENYUANSUOZAOSHOUDEANQUANWENTI;3) GUANGZUFUZHEXINGWENTI;4) QIPAOGOUCHENGJIHUAXUEJINGMIWUJINSHIKEYEWUFACHEDIYUJINGYUANWAIBIAOCHUMOSUOXINGCHENGDEBUCHEDIJIBUJUNYUNDEJINGMIWUJINSHIKE;5) FEIQIJIQIANZAIDEBAOZHAXING。

  SHISHIJINGMIWUJINSHIKEJINCHENGKEFENWEISANGEGUOCHENG:1) HUAXUEJINGMIWUJINSHIKEYEFENSANZHIDAIJINGMIWUJINSHIKEZILIAOZHIWAIBIAO;2) JINGMIWUJINSHIKEYEYUDAIJINGMIWUJINSHIKEZILIAOFAZUOHUAXUEFANXIANG; 3) FANXIANGHOUZHICHANPINCONGJINGMIWUJINSHIKEZILIAOZHIWAIBIAOFENSANZHIRONGYEZHONG,BINGSUIRONGYEPAICHU(3)。SANGEGUOCHENGZHONGJINXINGZUIMANZHEWEISULVCAOKONGGUOCHENG,YEJISHISHUOGAIGUOCHENGDEFANXIANGSULVJIWEIQUANBUFANXIANGZHISULV。

上海11选5走势图  4、SHISHIJINGMIWUJINSHIKEDESULV

  TONGCHANGKEJIEYOUGAIDONGRONGYENONGDUJIWENDUYUYICAOKONG。RONGYENONGDUKEGAIDONGFANXIANGWUZHIDIDAJITUOLIDAIJINGMIWUJINSHIKEWUWAIBIAODESULV,YIBANLAISHUO,DANGRONGYENONGDUTIANJIASHI,JINGMIWUJINSHIKESULVJIANGHUIJINBU。ERJINBURONGYEWENDUKEJIAKUAIHUAXUEFANXIANGSULV,JINERJIAKUAIJINGMIWUJINSHIKESULV。

  CHULERONGYEDEXUANYONGWAI,TIAOXUANSHIYONGDEPINGBIWUZHIYISHISHIFENZHONGYAODE,TABIXUYUDAIJINGMIWUJINSHIKEZILIAOWAIBIAOYOUJIHAODEFUZHEXING、BINGNENGJIESHOUJINGMIWUJINSHIKERONGYEDEFUSHIQIEANWENERBUTUIBIAN。ERGUANGZUTONGCHANGSHIYIGEJIHAODEPINGBIZILIAO,QIEYOUYUQITUANZHUANYINGUOCHENGJIANDAN,YINERCHANGBEIYUNYONG。DANYUNYONGGUANGZUZUOWEIPINGBIZILIAOSHIYEHUIFAZUOBIANJIBOLIHUOGUILIEDEJINGXIANG。BIANJIBOLINAIYOUYUJINGMIWUJINSHIKERONGYEDEFUSHI,XINGCHENGGUANGZUYUJICAIJIANDENIANZHEXINGBIANCHASUOZAOCHENGDE。CHULIDEBANFAZEKEYUNYONGNIANZHECUJINJILAITIANJIAGUANGZUYUJICAIJIANDENIANZHEXING,RUHexamethyl-disilazane (HMDS)。GUILIEZESHIYOUYUGUANGZUYUJICAIJIANDEYINGLIQUBIETAIDA,JIANHUANGUILIEDEBANFAKEYUNYONGJIAOJUDANXINGDEPINGBIYUANLIAOLAIXISHOULIANGZHEJIANDEYINGLICHA。


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